发明名称 |
ウェーハの洗浄・乾燥装置およびウェーハの洗浄・乾燥方法 |
摘要 |
PROBLEM TO BE SOLVED: To provide a wafer cleaning/drying device which allows size reduction of the device and can prevent wafer contamination by particle adhesion.SOLUTION: A wafer cleaning/drying device 10 comprises: a washing tank 12 whose upper part is formed to be a cylindrical part 14 and into which cleaning liquid flows; a rotor 20 formed into a cylinder connected to the washing tank 12, whose lower part side is fitted onto the cylindrical part 14 of the washing tank 12 so as to be arranged rotatably around a center axis of the cylindrical part and whose opening edge on an upper surface side is formed as a mounting part for a wafer 22 to be cleaned and dried; a driving part 26 which rotationally drives the rotor 20; and a bearing formed between the lower part of the rotor 20 and the cylindrical part 14 of the washing tank 12. |
申请公布号 |
JP6025119(B2) |
申请公布日期 |
2016.11.16 |
申请号 |
JP20120265722 |
申请日期 |
2012.12.04 |
申请人 |
不二越機械工業株式会社;国立研究開発法人産業技術総合研究所 |
发明人 |
中村 由夫;大塚 美雄;大久保 貴史;澁谷 和孝;原 史朗;クンプアン ソマワン;池田 伸一 |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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