INSPECTION APPARATUS AND COMPENSATING METHOD THEREOF

摘要

PURPOSE: A measuring device and a correcting method thereof are provided to enhance the usage efficiency of a pattern light projected from the projection unit and take a stable pattern image because the transmittance of a beam splitter is constituted higher than the reflectivity. CONSTITUTION: A correcting method of a measuring device is as follows. Images are obtained by taking of pictures of a calibration substrates in which a plurality of patterns is formed through a photographing unit having a camera and photographing lens(S100). Information related to a length between the plurality of patterns are obtained from the obtained images(S110). Reference data of the calibration substrates is brought(S120). Information related to a position of the calibration substrates is obtained by using the obtained information related to the length between the plurality of patterns and the information related to the length between the plurality of patterns from the reference data(S130). The photographing unit is calibrated by using the reference data of the calibration substrates and the information related to the position(S140).