THE METHOD OF THERMO-MECHANICALLY STABILIZATION OF RESONANCE RESPONSE OF METALLIC THIN-FILM RESONATOR BY INCORPORATION OF CNT NETWORK TO METALLIC THIN-FILM

摘要

PURPOSE: A thermo-mechanical stabilization method for the resonance response property of a metallic thin-film resonator by adding a CNT network is provided to minimize the change of the resonance response property of the metallic thin-film resonator by temperature. CONSTITUTION: A thermo-mechanical stabilization method for the resonance response property of a metallic thin-film resonator by adding a CNT network comprises the following steps: forming an aluminum foil with the thickness of 10nm on GaAs(gallium arse) using a plasma enhanced RF(Radio Frequency) sputter on a substrate; dipping the substrate coated with the aluminum foil into CNT solution formed by dispersing CNT in an organic solvent, dichlorobenzene; and drying the organic solvent using nitrogen.