| 摘要 |
PROBLEM TO BE SOLVED: To re-input a power source without the help of an operator, even in a latched-up state, by eliminating control failure due to rewriting of a program by external noise, by detecting the control failure due to malfunction of a peripheral circuit, in addition to a processor. SOLUTION: This vacuum pump comprises a first processor 40 and its peripheral circuit 30 for controlling a magnetic bearing, and a second processor 50 for executing control except for the control of the magnetic bearing. The function of monitoring run-away of the first processor 40 and the control failure of the magnetic bearing, the function of resetting the first processor 40, and the function of collating a memory of the first processor 40, are imparted to the second processor 50. A power cutoff circuit 60 is provided for cutting off supply of a power source to the first processor 40 and its peripheral circuit 30 by the second processor 50. COPYRIGHT: (C)2008,JPO&INPIT
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