发明名称 |
PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOTOLITHOGRAPHY APPARATUS AND CHARGED BEAM PHOTOLITHOGRAPHY APPARATUS |
摘要 |
A pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus and a charged beam photolithography apparatus which enable to maintain normality of the charged beam photolithography apparatus are provided. The pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus is a pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus which irradiates a charged beam on a target sample to write a desired pattern. Layout information and a pattern writing conditions which is prepared in advance are input to the pattern writing circuit, and processing result data of the pattern writing circuit output as a result of the inputting is collected. The collected processing result data of the pattern writing circuit is compared with correct data. The charged beam photolithography apparatus has means which realizes the pattern writing circuit self-diagnosis method.
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申请公布号 |
US2008067426(A1) |
申请公布日期 |
2008.03.20 |
申请号 |
US20070754771 |
申请日期 |
2007.05.29 |
申请人 |
NUFLARE TECHNOLOGY, INC. |
发明人 |
KIMURA HAYATO;HANDA YUJIN;WAKE SEIJI;MATSUKAWA TAKUYA;TSUCHIYA SEIICHI |
分类号 |
A61N5/00 |
主分类号 |
A61N5/00 |
代理机构 |
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地址 |
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