Substrate conveyance method and substrate processing apparatus

摘要

Provided is a substrate conveyance method where a segment which can simultaneously hold M pieces of substrates defined by an integer M of 2 or more is provided, and a substrate conveyance part can simultaneously convey N pieces of substrates defined by an integer N of 2 or more which is not a divisor of the integer M from the segment or toward the segment. The substrate conveyance part performs a substrate conveyance cycle repeatedly where when N pieces of variables ik defined by integers k of 1 to N are arbitrary integers of 0 or more and not more than (M/N) and satisfy a relationship of M=N×i1+ . . . +1×iN, a conveyance step where a substrate conveyance step of simultaneously conveying (N−k−1) pieces of substrates from the segment or toward the segment by the substrate conveyance part is performed ik times is performed with respect to the conveyance step where the number of times of the substrate conveyance steps is defined by each variable which is a natural number out of N pieces of variables ik.

主权项

1. A substrate conveyance method, for a system including a segment capable of simultaneously holding M substrates, where M is an integer equal or greater than, and a substrate conveyance part capable of simultaneously conveying from the segment or toward the segment, N of said substrates, where N is an integer equal or greater than 2 and N is not a divisor of said integer M, wherein the substrate conveyance method comprises:
repeatedly performing the step of: simultaneously conveying, when N pieces of variables ik defined by integers k of 1 to N are arbitrary integers of 0 or more and not more than (M/N) and satisfy a following formula 1,M=∑k=1N⁢[(N-k+1)⨯i⁢⁢k](Formula⁢⁢1) (N−k−1) of said substrates ik times, where the number of times of said conveying steps is defined by each variable which is a natural number out of said N of said variables ik.