NON-SILICON BASED BONDING SUBSTRATE AND METHOD OF MANUFATURING THE SAME

摘要

Disclosed are non-silicon-based binding substrate and a method for producing the same. A binding substrate according to an embodiment of the present invention is produced by binding a first substrate and a second substrate by a hydroxyl group (-OH group), in which a bound surface thereof is coated by a silane compound containing a mercapto group and an alkoxy group terminal is formed on the bound surface. Each of the first substrate and the second substrate is selected from a plastic base material which does not contain silicon, a zirconia (3Y-ZrO-_2) base material, and an alumina (α-Al_2O_3) base material.