MULTI-BEAM CURRENT QUANTITY MEASURING METHOD, MULTI-CHARGED PARTICLE DRAWING CONTROL DEVICE, AND MULTI-CHARGED PARTICLE BEAM DRAWING DEVICE

摘要

A current quantity measuring method of multi-beams irradiates with a charged particle beam, amplifies an electric signal corresponding to multi-beams passed through a plurality of aperture holes of an aperture member having the plurality of aperture holes to form multi-beams by irradiation with the charged particle beam, receives the electric signal amplified in the minute current measurement unit and counting the number of electrons in the multi-beams, calculates a current quantity of the multi-beams passed through the plurality of aperture holes by using a product of the calculated number of electrons in the multi-beams and elementary charge, and corrects irradiation time of the charged particle beam of each of the plurality of aperture holes on the basis of the calculated current quantity.

主权项

1. A current quantity measuring method of multi-beams, the method comprising:
irradiating with a charged particle beam; amplifying, in a minute current measurement unit, an electric signal corresponding to multi-beams passed through a plurality of aperture holes of an aperture member having the plurality of aperture holes to form multi-beams by irradiation with the charged particle beam; receiving, in a digitizer, the electric signal amplified in the minute current measurement unit and counting the number of electrons in the multi-beams; calculating a current quantity of the multi-beams passed through the plurality of aperture holes by using a product of the calculated number of electrons in the multi-beams and elementary charge; and correcting, in a correction unit, irradiation time of the charged particle beam of each of the plurality of aperture holes on the basis of the calculated current quantity.