发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device suitable for parallel operation.SOLUTION: A semiconductor device comprises an n type impurity diffusion region 14 formed between a p type body region 2 and an ndrift layer 1. The n type impurity diffusion region 14 has impurity concentration higher than impurity concentration of the ndrift layer 1. When the n-type impurity diffusion region 14 exists, by projecting at least one of a gate trench 1a and an emitter trench 1b from a location where impurity concentration in the n type impurity diffusion region 14 becomes 1×10cmto a second principal surface side, a high breakdown voltage (BV) can be held.SELECTED DRAWING: Figure 88
申请公布号 JP2016136643(A) 申请公布日期 2016.07.28
申请号 JP20160058154 申请日期 2016.03.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKAMURA KATSUMITSU
分类号 H01L29/739;H01L29/06;H01L29/78 主分类号 H01L29/739
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