| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation system capable of improving throughput of the whole device, by making both compatible in attainment of energy-saving and high speed exhaust of a vacuum chamber, by reducing electric power consumption of the whole system.SOLUTION: This evacuation system exhausts gas in the vacuum chamber, and includes a first vacuum pump unit 1 connected to the vacuum chamber CH via an opening-closing valve V1, and a second vacuum pump unit 2 connected to the vacuum chamber CH via an opening-closing valve V2. The exhaust side of the second vacuum pump unit 2 is branched off, and one is connected to the intake side of the first vacuum pump unit 1, and the other is connected to an exhaust pipe. |
