发明名称 研磨治具
摘要 PROBLEM TO BE SOLVED: To provide a holding jig capable of switching a plane to be ground of a sample to a plane surface or a cross section in a state that the sample is pasted to a sticking block.SOLUTION: A holding jig 1 has a body 110, a sticking block 120, a rotating part 10 and a fixed part 20. The rotating part 10 rotates around a rotating shaft 30 as a center with respect to the body 110 while retaining a sticking block 120. The fixed part 20 is linked with the rotating part 10 via the rotating shaft 30, and fixed with respect to the body 110. The rotating part 10 has a first surface 11 opposed to the grinding surface 151 of a polishing surface plate 150, a second surface 12 that intersects orthogonally with this surface, and a third surface 13 that is opposed to a corner between the first surface and second surface. A holding part 15 that holds a sticking block 120 is installed at the corner between the first surface 11 and second surface 12. The rotating shaft 30 intersects the third surface and is inclined at 45° with respect to the grinding surface 151. By rotating the rotating part 10 by 180°, a part to be ground of a sample S is switched to a plane surface or a cross section.
申请公布号 JP6020968(B2) 申请公布日期 2016.11.02
申请号 JP20130064761 申请日期 2013.03.26
申请人 住友電気工業株式会社 发明人 上村 重明;川田 国安
分类号 B24B41/06;B24B37/34 主分类号 B24B41/06
代理机构 代理人
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