Method for Manufacturing a Semiconductor Device by Hydrogen Treatment

摘要

A method of manufacturing a semiconductor device includes: forming a porous area at a surface of a semiconductor body; forming a semiconductor layer on the porous area by epitaxial growth; forming semiconductor regions including source, drain, body, emitter, base and/or collector regions in a front surface of the semiconductor layer, wherein the front surface of the semiconductor layer corresponds to a front side of the semiconductor device; introducing, after forming the semiconductor regions, hydrogen into the porous area by a thermal treatment, wherein the semiconductor layer with the semiconductor regions is separated from the semiconductor body along the porous area; and applying, after separation of the semiconductor layer, rear side processing to the semiconductor layer, wherein a rear side of the semiconductor layer corresponds to a rear side of the semiconductor device.

主权项

1. A method of manufacturing a semiconductor device, the method comprising:
forming a porous area at a surface of a semiconductor body; forming a semiconductor layer on the porous area by epitaxial growth; forming semiconductor regions including source, drain, body, emitter, base and/or collector regions in a front surface of the semiconductor layer, wherein the front surface of the semiconductor layer corresponds to a front side of the semiconductor device; introducing, after forming the semiconductor regions, hydrogen into the porous area by a thermal treatment, wherein the semiconductor layer with the semiconductor regions is separated from the semiconductor body along the porous area; and applying, after separation of the semiconductor layer, rear side processing to the semiconductor layer, wherein a rear side of the semiconductor layer corresponds to a rear side of the semiconductor device.