| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece carrier, not causing flaw and chip in the wide wall of a workpiece in polishing the workpiece. <P>SOLUTION: This workpiece carrier 10 has a workpiece-holding hole 10a for holding a plate-like workpiece, which is held between a lower platen and having a flat polishing upper surface driven in rotation and an upper platen disposed opposite to the lower platen and having a flat polishing lower surface driven in rotation and subjected to double-sided polishing. An elastic member 14 is provided at least on a part of the inner wall surface of the workpiece-holding hole 10a. <P>COPYRIGHT: (C)2007,JPO&INPIT |
