发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
摘要 Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
申请公布号 US2009152673(A1) 申请公布日期 2009.06.18
申请号 US20080130877 申请日期 2008.05.30
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 KWON O-KYUN;SUH DONG-WOO;PYO JUNGHYUNG;KIM GYUNG-OCK
分类号 H01L23/482;H01L21/76 主分类号 H01L23/482
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