Gyrometer with reduced parasitic capacitances

摘要

Gyrometer including a substrate and an inertial mass suspended above the substrate, the inertial mass including an excitation part and a detection part, means of moving the excitation part is movable in at least one direction contained in the plane of the inertial mass, and capacitive detection device detecting movement of the detection part outside the plane of the mass. The capacitive detection device includes comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with the detection part, the electrode being held above the detection part by at least one pillar passing through the inertial mass.

主权项

1. Gyrometer comprising:
a substrate; an inertial mass suspended above the substrate, the inertial mass formed from a planar layer of material comprising at least one excitation part and at least one detection part, wherein the excitation part is movable relative to the substrate in at least one direction contained in a plane of said inertial mass; and a capacity detector configured to detect movement of said detection part outside the plane of said inertial mass, said capacitive detector consisting of a detection electrode suspended above the detection part such that an entire detection electrode is above a plane under which an entire inertial mass is located and the detection part is interposed between the detection electrode and the substrate so as to form a variable capacitor with said detection part, said detection electrode being held above said detection part by at least one pillar anchored to said detection electrode at a first end of the pillar, passing through the inertial mass, and anchored to the substrate.