发明名称 OPTICAL IMAGING DEVICE, SYSTEM, AND METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical imaging device having a diaphragm. <P>SOLUTION: An optical imaging device has: a plurality of optical elements arranged in a beam path; a diaphragm having an opening, a first region, and a second region that is extended inside the first region along a radial direction of the diaphragm; and a storage part. The storage part is arranged outside the beam path of the plurality of optical elements. The diaphragm is movable between a first position in the storage part and a second position in the beam path. The second region is extended outside along a direction vertical to the radial direction of the diaphragm, to the first region. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012094916(A) 申请公布日期 2012.05.17
申请号 JP20120022377 申请日期 2012.02.03
申请人 CARL ZEISS SMT GMBH 发明人 BEKE HERMANN;WILL MARCUS;BISCHOFF THOMAS;KWAN YIM-BUN PATRICK;NGUYEN UY-LIEM;XALTER STEFAN;MICHAEL MUHLBAUER
分类号 H01L21/027;G02B5/00;G02B13/14;G03F7/20 主分类号 H01L21/027
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