发明名称 |
OPTICAL IMAGING DEVICE, SYSTEM, AND METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical imaging device having a diaphragm. <P>SOLUTION: An optical imaging device has: a plurality of optical elements arranged in a beam path; a diaphragm having an opening, a first region, and a second region that is extended inside the first region along a radial direction of the diaphragm; and a storage part. The storage part is arranged outside the beam path of the plurality of optical elements. The diaphragm is movable between a first position in the storage part and a second position in the beam path. The second region is extended outside along a direction vertical to the radial direction of the diaphragm, to the first region. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012094916(A) |
申请公布日期 |
2012.05.17 |
申请号 |
JP20120022377 |
申请日期 |
2012.02.03 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
BEKE HERMANN;WILL MARCUS;BISCHOFF THOMAS;KWAN YIM-BUN PATRICK;NGUYEN UY-LIEM;XALTER STEFAN;MICHAEL MUHLBAUER |
分类号 |
H01L21/027;G02B5/00;G02B13/14;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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