发明名称 プラズマ処理装置及びフィルタユニット
摘要 A filter unit 54(IN) includes a housing 82 formed of a cylindrical conductor. Further, in the housing 82, the air-core solenoid coils AL1 and BL1; the first capacitors AC1 and BC1; the troidal coils AL2 and BL2; and the second capacitors AC2 and BC2 are arranged in this sequence from top to bottom. In the vicinity of the air-core solenoid coils AL1 and BL1, a multiple number of rod-shaped comb-teeth members 86, which are extended in parallel to a coil axis direction, are provided adjacent to outer peripheries of the air-core solenoid coils AL1 and BL1 at a regular interval in a circumferential direction thereof. A comb teeth M are formed on an inner surface of each comb-teeth member 86, and the comb teeth M are inserted into winding gaps of the air-core solenoid coils AL1 and BL1.
申请公布号 JP6050722(B2) 申请公布日期 2016.12.21
申请号 JP20130110201 申请日期 2013.05.24
申请人 東京エレクトロン株式会社 发明人 奥西 直彦
分类号 H05H1/46;C23C16/505;H01L21/3065;H03H7/01 主分类号 H05H1/46
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