| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of positioning with high accuracy by reducing the influence of disturbance caused by a cable member such as a power supply cable, a sensor cable or a vacuum supply cable. SOLUTION: This stage device has a substrate stage 8 movable in at least biaxial directions, a cable jogging unit 10 jogging in at least biaxial directions while holding the cable member 11 connected to the substrate stage 8, and a cable coarse adjusting unit 6 for coarsely adjusting the cable jogging unit 10 at least in a uniaxial direction. COPYRIGHT: (C)2005,JPO&NCIPI |
