EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

A semiconductor device manufacturing apparatus is provided to shorten a cleaning time by separating the dummy wafer cartridge from an upper part of a lifter by using a clamp. A process chamber performs a semiconductor process of a wafer. A transfer chamber includes a robot arm for transferring the wafer to the process chamber. A load lock chamber(110) is connected with the transfer chamber and receives a cassette on which a plurality of wafers are loaded. A lifter(116) moves the cassette in a vertical direction within the load lock chamber. A dummy wafer cartridge(118) is used for receiving a plurality of dummy wafers in parallel to the wafers within the cassette. The dummy wafer cartridge is coupled with an upper part of the lifter in order to discharge pollutants through a door of the load lock chamber.