发明名称 Accessible chip stack and process of manufacturing thereof
摘要 A process of manufacturing a three-dimensional integrated circuit chip or wafer assembly and, more particularly, a processing of chips while arranged on a wafer prior to orienting the chips into stacks. Also disclosed is the manufacture of the three-dimensional integrated circuit wherein the chip density can be very high and processed while the wafers are still intact and generally of planar constructions.
申请公布号 US2007096263(A1) 申请公布日期 2007.05.03
申请号 US20050266456 申请日期 2005.11.03
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FURUKAWA TOSHIHARU;HAKEY MARK C.;HOLMES STEVEN J.;HORAK DAVID V.;KOBURGER CHARLES W.III
分类号 H01L29/40;H01L21/44 主分类号 H01L29/40
代理机构 代理人
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