| 摘要 |
An apparatus for manufacturing a flat panel display device is provided to block effectively the flow of gas by implementing sealing members at a surface of blocking members contacted with a plate for valving an exhausting line. An apparatus for manufacturing a flat panel display device includes a process chamber, an exhausting unit, a rotation shaft(214), a plate(216), blocking members(218a,218b), and a sealing member(219). The exhausting unit exhausts gas generated from the process chamber. The exhausting line connects the process chamber and exhausting unit. The rotation shaft crosses over the inner periphery of the exhausting line. The plate, which is connected to the rotation shaft, adjusts opening and closing of the exhausting line. The blocking members, which are protruded from the inner periphery of the exhausting line at upper and lower portions, prevent gap between the plate and exhausting line. The sealing member, which is formed on a surface of the blocking members, adhesives the plate and blocking members.
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