| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a silicon substrate for a solar battery having a high photoelectric conversion efficiency, which enables the manufacturing of a single crystal silicon substrate having a surface of high cleanliness.SOLUTION: The present invention relates to a device for manufacturing a silicon substrate for a solar battery for performing a surface treatment on a single crystal silicon substrate including a first principal face, a second principal face and a side face between the first and second principal faces with the substrate held by a substrate holder. The device comprises: an etching bath for forming a concave and a convex on a surface of the substrate by putting a substrate in contact with an alkali liquid solution; and a process bath for processing the surface of the substrate with the concave and convex formed therein by ozone dissolving in the liquid solution. The substrate holder has a bottom part capable of holding the substrate so that the side face of the substrate is located on a lower side; the bottom part has an opening which allows the side face of the substrate to be exposed. The device further comprises: a supplying part for supplying ozone in the process bath; and setting means for setting the substrate holder with the substrate held therein in the process bath. In the device, ozone gas or ozone water is introduced as ozone from the supplying part via the opening so as to directly touch the side face of the substrate.SELECTED DRAWING: Figure 1 |
