发明名称 |
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME, OR DISPLAY DEVICE HAVING THE SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a novel semiconductor device having an oxide semiconductor film.SOLUTION: A semiconductor device has a first transistor and a second transistor. The first transistor has: a first gate electrode; a first insulating film on the first gate electrode; a first oxide semiconductor film on the first insulating film; a source electrode electrically connected with the first oxide semiconductor film; a drain electrode electrically connected with the first oxide semiconductor film; a second insulating film on the first oxide semiconductor film; a second oxide semiconductor film provided on the second insulating film and that functions as a second gate electrode; and a third insulating film on the second oxide semiconductor film. The second transistor has: a third oxide semiconductor film provided on the second insulating film and that includes a channel region, a source region, and a drain region; a fourth insulating film on the channel region; a third gate electrode on the fourth insulating film; and a third insulating film on the source region and the drain region.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016213454(A) |
申请公布日期 |
2016.12.15 |
申请号 |
JP20160090036 |
申请日期 |
2016.04.28 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
HIZUKA JUNICHI;KAMINAGA MASAMI;OIKAWA YOSHIAKI |
分类号 |
H01L29/786;G02F1/1345;G02F1/1368;H01L51/50;H05B33/14 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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