发明名称 CONTROL DEVICE, IRRADIATION DEVICE AND DRIVE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a technology is advantageous to achievement of both of synchronous high accuracy and speed-up of control in controlling a plurality of motors.SOLUTION: A control device includes a plurality of feed forward controllers for controlling each of a plurality of motors, and controls the plurality of motors, and the control device in which each of the plurality of feed forward controllers includes a function expressing an input/output characteristic of at least one motor of the plurality of motors different from the motor of a control object of the feed forward controller, and requiring synchronization with the motor out of the control object, and the function includes a product of a function expressing a characteristic of a rigid mode of the at least one motor and character of a resonance mode thereof, and an inverse function of the function expressing the characteristic of the rigid mode.SELECTED DRAWING: Figure 4
申请公布号 JP2016212923(A) 申请公布日期 2016.12.15
申请号 JP20160179022 申请日期 2016.09.13
申请人 CANON INC 发明人 UEDA SHINJI
分类号 G05B11/32;H02P5/56 主分类号 G05B11/32
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