| 摘要 |
PROBLEM TO BE SOLVED: To certainly hold a substrate W without complicating a device structure or enlarging the whole of the device.SOLUTION: A substrate holding device is equipped with a platen 10, and a clamp mechanism 22. The clamp mechanism 20 is equipped with a plurality of clampers 21 which is provided corresponding to each side of a substrate W, and can move between a holding position X holding the substrate W and a releasing position releasing the substrate W; and a power transmission mechanism 22 which transmits driving force for moving the clamper 21 between one edge side clamper 21 provided corresponding to one side of two opposite sides of the substrate W and the other edge side clamper 21 provided corresponding to the other side. The power transmission mechanism 22 has a slide member 7 which slides in a predetermined direction with the movement of the one edge side clamper 21 or the movement of a member transmitting the driving force to the one edge side clamper 21, and transmits the driving force to the other edge side clamper 21.SELECTED DRAWING: Figure 2 |
