| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for imprementing edge bar and serif correction features synthesis processes. <P>SOLUTION: Hierarchical mask pattern data is converted into non-hierarchical data, and the data is then divided into many tiles. Edge bars are synthesized for all edges of individual tile, and serifs are synthesized with respect to all corners. The method for serif synthesis is performed by initially formatting tile date into a vertex representation 100 and synthesizing a positive serif for each convex corner and a negative vertex for each concave corner 101. The list of serifs is examined to filter out serifs that are too close to one another 102, the positive serifs are concatenated 103, and the negative serifs are geometrically subtracted from the modified tile data 104. <P>COPYRIGHT: (C)2007,JPO&INPIT |
