| 发明名称 |
MANUFACTURING METHOD OF MOLD HAVING MICROPATTERN AND MANUFACTURING METHOD OF OPTICAL DEVICE USING THE MOLD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a mold that has a micro and precise concavo-convex shape pattern and can perform excellent transfer. <P>SOLUTION: The manufacturing method of the mold comprises: forming a micropattern on a substrate; forming silicon dioxide film 33 in a tip portion of the micropattern to prepare thick width portions in the tip portion; removing a substrate 3 after covering a metal 4 for a mold on the substrate 3 having this pattern formed; and forming a mold having a micropattern comprising thick width portions 61 wherein tip portions are overhung. <P>COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2007098839(A) |
申请公布日期 |
2007.04.19 |
| 申请号 |
JP20050293480 |
申请日期 |
2005.10.06 |
| 申请人 |
SANYO ELECTRIC CO LTD |
发明人 |
KOBAYASHI SHINJI;SOMEYA KAZUAKI;HIGUCHI MASAHIRO;MAENO YOSHIAKI;YAMAGUCHI ATSUSHI |
| 分类号 |
B29C33/38;B29C33/42;B29C45/37;B29L11/00;G02B1/11 |
主分类号 |
B29C33/38 |
| 代理机构 |
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代理人 |
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