| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position detecting device/method for precisely detecting a position of a mask substrate. <P>SOLUTION: The position detecting device is provided with at least one first lighting system 3 which is arranged so that the rear face of a mask substrate 9 and the emitting center of illumination are on the same face and the surface and the rear face of the substrate are irradiated with light in almost parallel directions from the side direction of the substrate, a second lighting system 4 in which a region comprising a substrate edge 10 is irradiated with light in a direction almost vertical to the surface of the substrate from above the surface of the substrate, an image pickup device 5 which is arranged at the rear side of the substrate so that the edge is positioned in an image pickup range and image-picks up the rear side of the substrate, and a position detecting part 12 detecting an edge position of at least one edge of the substrate from a first image obtained from the image pickup device 5 in a state that it is irradiated with light from the first lighting system 3 and a second image obtained by the image pickup device 5 in a state that it is irradiated with light from the second lighting system 4. <P>COPYRIGHT: (C)2008,JPO&INPIT |
