| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical matrix device securely removing a faulty portion and improving a manufacturing yield. SOLUTION: In the manufacturing method, a gate line is formed in step S1. The disconnection or short-circuit of the data line formed in step S1 is checked immediately after step S1 in step S2. Therefore, a faulty portion which is the disconnection or short-circuit can be securely discovered in step S2. A data line is formed in step S5. The disconnection or short-circuit of the data line formed in step S5 is checked immediately after step S5 in step S6. Therefore, a faulty portion which is the disconnection or short circuit can be securely discovered in step S6. As a result, the discovered faulty portion can be securely repaired in steps S3 and S7. COPYRIGHT: (C)2009,JPO&INPIT |
