Method and Compound System for Inspecting and Reviewing Defects

摘要

The present invention provides an improved electron-optical apparatus for the inspection and review of the specimen, and for the defect inspection, an inspection mode of operation is performed to generate inspection data, wherein the large beam current is formed by a magnetic immersion lens to scan the specimen, and preferably the objective lens system, a swing objective retarding immersion lens, focuses the beam current and generates the large scanning field, and for the defect review, the review mode of operation is performed to analyze the defects, wherein the large beam current is abandoned and the small beam current is adopted to examine the specimen without a large scanning field, and in order to properly select and detect signal charged particles excited from the specimen, a first Wien filter is utilized to select the acquired signal particles and a second Wien filter is used to compensate the aberrations induced when the signal particles pass through the first Wien filter.

主权项

1. A charged particle beam apparatus, comprising:
a charged particle source for generating a beam current; an immersion condenser lens for an inspection mode of operation; a non-immersion condenser lens below the charged particle source for a review mode of operation; an objective lens for focusing the beam current onto a specimen; a first electron optical element in the objective lens to deflect signal charged particles emanated from the specimen; a second electron optical element to compensate aberrations generated when the signal charged particles pass through the first electron optical element; and a detector system with multi-channels for detecting the signal charged particles.