| 发明名称 |
SUBSTRATE LIFT ASSEMBLIES |
| 摘要 |
A substrate lift assembly is disclosed. The substrate lift assembly includes a lift frame, a plurality of fingers extending from the frame, the fingers adapted to support a substrate, and a containment ring supported by the lift frame. Process load locks including the substrate lift assembly are disclosed, as are other aspects. |
| 申请公布号 |
US2016240410(A1) |
申请公布日期 |
2016.08.18 |
| 申请号 |
US201615139274 |
申请日期 |
2016.04.26 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Reuter Paul B.;Balasubramanian Ganesh;Rocha-Alvarez JuanCarlos;Robinson Jeffrey B.;du Bois Dale Robert;Connors Paul |
| 分类号 |
H01L21/67;H01L21/673;H01L21/677 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate lift assembly, comprising:
a lift frame; a plurality of fingers extending from the frame, the fingers adapted to support a substrate; and a containment ring supported by the lift frame. |
| 地址 |
Santa Clara CA US |
