| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder that reduces a frictional force generated at a sliding surface of a spherical fulcrum and a spherical receiver, with which a stage is not deformed over time even when the stage is subjected to an oscillatable movement (sample position adjustment).SOLUTION: The sample holder includes: a holding part 111 for holding a sample; and a spherical fulcrum 127, disposed by being in close contact with a spherical receiver, capable of adjusting a sample position by sliding. A sliding surface of the spherical fulcrum 127 has a metal area 155 and an area 157 of a member whose friction is smaller than that of the metal.SELECTED DRAWING: Figure 8 |
