| 摘要 |
PROBLEM TO BE SOLVED: To provide a silane compound useful for the production of a semiconductor device.SOLUTION: The present invention provides a compound represented by formula (5) [Ris alkoxy, acyloxy or halogen; a is 1; Ris a group represented by formula (6) (one of R-Rand Ar-Arbonds to an Si atom by an Si-C bond; Rand Rindependently represent a monovalent-tetravalent hydrocarbon; Ris a divalent-tetravalent hydrocarbon; Arand Arare a substituted/unsubstituted phenyl or phenylene group; nis 1; n, n-nindependently represent 0 or 1)].SELECTED DRAWING: None |
