| 摘要 |
PROBLEM TO BE SOLVED: To provide a separation membrane and a manufacturing method of the separation membrane, for uniformizing a pore diameter for permeating gas, and controlling a size of the pore diameter.SOLUTION: In a separation membrane, a partial hydroxy group in a silica network formed by a hydrolysis and polycondensation of a silica source having an alkoxy group, is substituted with fluorine. A manufacturing method of the separation membrane includes: a fluorine dope silica sol preparation process of preparing fluorine dope silica sol in which a hydroxy group in a silica network formed by the hydrolysis and the polycondensation of a silica source is substituted with the fluorine by reacting a fluorine source and the silica source having the alkoxy group in a solvent including water; and a membrane formation process of providing the separation membrane by drying and baking the fluorine dope silica sol.SELECTED DRAWING: Figure 1 |
