发明名称 MACHINING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a machining device capable of achieving efficient machining.SOLUTION: A machining device (2) includes: a chuck table (12); machining means (24, 26, 28, 50); and machining feeding means (14) for feeding the machining means for machining. Each of the machining means includes: a spindle housing (30) for supporting a spindle (34) to which a machining tool (42) is attached; a holder (24) to which the spindle housing is attached; inclination control means (26) for controlling inclination of the spindle housing between the holder and the spindle housing; and control means (50) for controlling each component. The inclination control means includes load detection means (44a) and inclination adjustment means (44b) constituted of a piezoelectric element. When a workpiece (11) is machined, the control means elongates and contracts the inclination adjustment means by applying voltage corresponding to the load detected by the load detection means to the piezoelectric element of the inclination adjustment means so as to control the inclination of the spindle housing.SELECTED DRAWING: Figure 1
申请公布号 JP2016203290(A) 申请公布日期 2016.12.08
申请号 JP20150086420 申请日期 2015.04.21
申请人 DISCO ABRASIVE SYST LTD 发明人 HATTORI MASATO
分类号 B24B41/047;B24B7/04;B24B37/10;H01L21/304 主分类号 B24B41/047
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