| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor processor capable of partitioning in air-tight a reaction area and a transfer area in a chamber. SOLUTION: A mount block 20 detachable to a susceptor 19 and permitting the mounting of a semiconductor wafer 23, and a support mechanism 21 capable of supporting the mount block at a predetermined position, are provided in the chamber. Further, a sealing mechanism 22 is provided between the susceptor and a separating plate. The mount block is detachable with respect to the susceptor by moving the susceptor under a condition that the same is supported by the supporting mechanism. The semiconductor wafer is introduced and carried out under a condition that the mount block is separated from the susceptor whereby a shift pin becomes unnecessary and, as a result, the reaction area can be partitioned from the transfer area in air-tight by the seal mechanism. COPYRIGHT: (C)2005,JPO&NCIPI
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