| 摘要 |
PROBLEM TO BE SOLVED: To realize formation of a metal oxide film of a superior quality in a manufacturing method of a plasma display panel having a process to form the metal oxide film on a substrate of the plasma display panel. SOLUTION: In the process of forming a protecting layer 8 composed of a metal oxide MgO film, the film formation is carried out within a definite range of a partial pressure, for example of oxygen gas partial pressure in a vapor deposition room 21 which is the film forming room. By this, because the film formation is made to be carried out under an atmosphere controlled constant in the vapor deposition room 21, the film property can be made stable, and the plasma display panel capable of carrying out superior image display can be manufactured. COPYRIGHT: (C)2005,JPO&NCIPI
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