| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying system for enhancing a conveyance efficiency without greatly remodeling a stocker itself. SOLUTION: A conveyance mechanism 120 is installed adjoining to the stocker 110 in a united manner. The conveyance mechanism 120 comprises a mounting block 126 for placing a cassette 500 received from an AGV 600; a shaft 124 extended perpendicularly from the mounting block 126; and one arm 122 for conveying the cassette 500 upward along the shaft 124. The arm 122 conveys the cassette 500 received from the AGV 600 upward and passes it to an OHS 320 without going through the stocker 110. COPYRIGHT: (C)2006,JPO&NCIPI
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