| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem of electron beam surface reformation carried out by repetitive irradiation of electron beam pulses having a large cross section area and small energy density, which worsens the quality of a surface to be processed due to generation of craters or indentations. <P>SOLUTION: The surface reformation is carried out, possibly by only one time of generation and irradiation of the electron beam pulse. In case additional or further repetitive irradiation is necessary, environment of a housing is conditioned by discharging a gas for cleaning in the vacuum housing, in combination with opening and closing of a fan or the like, and it is switched over to an operation of electron beam generation. In case the surface reformation is predicted to be finished by one time or two times of electron beam irradiation, a first and a second electron gun parts are arranged in parallel against the housing. In case the electron beam irradiated from the first electron gun part is not sufficient for surface reformation, an object to be irradiated is immediately transferred to the position of the second electron gun part, and the electron beam is irradiated by switching a power source. <P>COPYRIGHT: (C)2007,JPO&INPIT |
