| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide techniques of removing a minute foreign matter to efficiently remove a minute foreign matter in a recessed region on an object surface while giving no damage to the surface. <P>SOLUTION: The method for removing a minute foreign matter aims to remove a minute foreign matter 11 on the surface of an object 12 having a predetermined projections and recesses by using a fine needle-like body 10 having elastic force. First, a minute foreign matter in a recessed region 12a of the object surface is detected, the minute foreign matter is pushed on the side to move by the fine needle-like body to be into contact with the side face 12b of the recessed region. While the minute foreign matter is abutted with the side face of the recessed region, the fine needle-like body is raised along the side face toward an upper part of the projection 12c to rake out the minute foreign matter with elasticity of the needle-like body. After raking, the object may be cleaned. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
