PIEZO-ELECTRIC TYPE INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME

摘要

A piezoelectric type inkjet print head and a manufacturing method thereof are provided to reduce a process in comparison with the process mixing a dry etching and a wet etching by using the only dry etching. An inkjet print head(100) is formed by bonding a first substrate(110) and a second substrate(120). An ink path is formed inside the first substrate. A piezoelectric actuator(150) is prepared on the first substrate. The ink path is composed of an ink input unit(131), a pressure chamber(134), a restrictor(133), and a nozzle(135). A middle oxide layer(122) is formed on a first silicon layer(121). A second silicon layer(123) is formed on the middle oxide layer. The first silicon layer is made of the silicon single crystal.