发明名称 PHOTOMASK FOR DEPRESSING A THERMAL STRESS BY HEATING
摘要 A photomask comprises: a light-transmissive substrate having a transfer unit and a frame unit; a light-transmissive area configured to form a transfer pattern by exposing the light-transmissive substrate in the transfer unit; and a light blocking area configured to surround the light-transmissive area in the transfer unit. The light blocking area comprises: a first light blocking area in which a first light blocking layer pattern is arranged on the light-transmissive substrate to surround the light-transmissive area along a light-transmissive area circumference; and a second light blocking area in which a plurality of second light blocking layer patterns are arranged on the light-transmissive substrate to surround the first light blocking area.
申请公布号 KR20160103393(A) 申请公布日期 2016.09.01
申请号 KR20150025835 申请日期 2015.02.24
申请人 SK HYNIX INC. 发明人 NAM, BYUNG HO
分类号 H01L21/033;G03F1/54;G03F7/20;H01L21/027 主分类号 H01L21/033
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