| 摘要 |
PROBLEM TO BE SOLVED: To easily manufacture a machine component made of silicon material and having high precision and sufficient durability.SOLUTION: A manufacturing method of a machine component, in steps (a) to (f), etches a silicon substrate 20 to form a hair spring 10 as a machine component, and forms a machined substrate 20A so that the hair spring is supported in a state where only a portion of the hair spring is connected to a portion of the silicon substrate 20 not having been etched; in steps (g) to (j), machines the machined substrate 20A to form a machined substrate 20C so that the above hair spring 10 does not contact with portions other than the hair spring 10 of the machined substrate 20A; in a step (k), executes hydrogen annealing as surface treatment for flattening the surface of the above hair spring 10; and then in a step (l), cuts the portion connected to the above hair spring 10 to separate it from the machined substrate 20C.SELECTED DRAWING: Figure 4 |
