发明名称 |
PHOTODETECTOR AND METHODS OF MANUFACTURE |
摘要 |
Photodetector structures and methods of manufacture are provided. The method includes forming undercuts about detector material formed on a substrate. The method further includes encapsulating the detector to form airgaps from the undercuts. The method further includes annealing the detector material causing expansion of the detector material into the airgaps. |
申请公布号 |
US2016322419(A1) |
申请公布日期 |
2016.11.03 |
申请号 |
US201514699015 |
申请日期 |
2015.04.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ELLIS-MONAGHAN John J.;HALL John C.S.;KHATER Marwan H.;KIEWRA Edward W.;SHANK Steven M. |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Armonk NY US |