发明名称 絶縁膜形成用感光性樹脂組成物、絶縁膜、及び絶縁膜の形成方法
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition for forming insulating film, which can form an insulating film with excellent insulation and chemical resistance, and has a wide exposure margin in forming a pattern of the insulating film, and provide an insulating film formed using the photosensitive resin composition for forming insulating film, and an insulating film formation method using the photosensitive resin composition for forming insulating film.SOLUTION: In a photosensitive resin composition including (A) alkali-soluble resin, (B) photopolymerizable monomer, and (C) photopolymerization initiator, a compound of a specific structure is mixed, and as the (A) alkali-soluble resin, a resin comprising a structural unit derived from an unsaturated compound including a specified amount of epoxy group is used.
申请公布号 JP6022847(B2) 申请公布日期 2016.11.09
申请号 JP20120174451 申请日期 2012.08.06
申请人 東京応化工業株式会社 发明人 大内 康秀;染谷 和也
分类号 G03F7/033;G03F7/004;G03F7/038 主分类号 G03F7/033
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