发明名称 Apparatus and method for measurement of the mechanical properties and electromigration of thin films
摘要 A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.
申请公布号 US6025918(A) 申请公布日期 2000.02.15
申请号 US19980111456 申请日期 1998.07.07
申请人 BROWN UNIVERSITY RESEARCH FOUNDATION 发明人 MARIS, HUMPHREY J.
分类号 G01N21/17;(IPC1-7):G01B11/00 主分类号 G01N21/17
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