| 摘要 |
A system for processing a priority in a semiconductor fabricating process is provided to immediately cope with errors and perform a high-priority process when an exceptional situation occurs by processing the errors and/or the exceptional situation while using an additional queue. A plurality of process units perform a semiconductor fabricating process. A control part generates the first queue including processes for general operation of the process units and controls the operation of the process units so that the processes are performed by the priority of the first queue. The control part generates at least one of the second queue to process an event when the event occurs in performing the processes and compares the priority of the processes of the first and second queues to perform a higher-priority process.
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