| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical image measuring apparatus for quickly starting an image measurement in response to a measurement starting request, and properly measuring an image in a region to be focused when the measured region is determined. <P>SOLUTION: When an observation light M is focused to an observing CCD camera 23, measuring CCD cameras 21, 22 are disposed so as to position a measurement object point Q separated from a location of an observement object point P to the apparatus at a distance d. An interferometer moving stage 50 changes an optical path difference so as to move the measurement object point Q toward the observed point P in response to an operation of a measurement starting switch 60. The distance d is a distance or more required for accelerating the interferometer moving stage 50 to a fixed speed. The image measurement can be quickly started in response to the measurement starting request for the image of a measurement object O. The image can be measured in the region to be focused when the measured region is determined i.e. the location of the observed object point. <P>COPYRIGHT: (C)2007,JPO&INPIT |
