| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gray scale mask wherein a difference (or a ratio) between the maximum transmittance and the minimum transmittance which can be actually obtained can be made larger than that of a conventional gray scale mask. <P>SOLUTION: The difference between a numerical aperture when pitch P is 2.5 μm and a gap G is 0.3 μm and a numerical aperture when the pitch P is 2.5 μm and the gap G is 2.0 μm, for example, is only 57.7%, in the conventional gray scale mask wherein circular patterns are arranged in a squarer shape as shown in (a) and on the other hand, the difference between numerical apertures when pitch P is 2.5 μm and a gap G is 0.3 μm and a numerical aperture when the pitch P is 2.5 μm and the gap G is 2.0 μm can be expanded to 66.6% in this gray scale mask wherein circular patterns are arranged in a hexagonal shape as shown in (b). <P>COPYRIGHT: (C)2007,JPO&INPIT |
