| 摘要 |
PURPOSE: A film forming device and a manufacturing device are provided to shorten processing time per one substrate by forming a second electrode layer of an electro luminescence element and a protective layer in a lump. CONSTITUTION: A chamber is connected with a deposition chamber. A sputter chamber is connected with the chamber. The sputter chamber comprises a pair of targets and a substrate holder(15). The substrate holder purchases a plurality of substrates(13) between the pair of targets. The sputter chamber, the chamber, and the deposition chamber respectively have an exhaust unit. The chamber is connected with a mask stock room in which a mask is accepted. A protective layer is formed on the plurality of substrates. |
